Photomasks, the printing masters for the fabrication of integrated circuits, have become a necessity of modern semiconductor manufacturing. This book details the science and technology of industrial photo mask production, including fundamental principles, industrial production flows, and technological evolution.
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语言 英语 ● 格式 PDF ● 网页 500 ● ISBN 9780071588911 ● 出版者 McGraw-Hill Education ● 发布时间 2005 ● 下载 6 时 ● 货币 EUR ● ID 2253383 ● 复制保护 Adobe DRM
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