Daniel J. Ehrlich & Jeffrey Y. Tsao 
Laser Microfabrication [PDF ebook] 
Thin Film Processes and Lithography

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This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.

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Language English ● Format PDF ● ISBN 9780080918020 ● Editor Daniel J. Ehrlich & Jeffrey Y. Tsao ● Publisher Elsevier Science ● Published 1989 ● Downloadable 6 times ● Currency EUR ● ID 2675314 ● Copy protection Adobe DRM
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