Following their first observation in 1984, random telegraph signals (RTS) were initially a purely scientific tool to study fundamental aspects of defects in semiconductor devices. As semiconductor devices move to the nanoscale however, RTS have become an issue of major concern to the semiconductor industry, both in the development of current technology, such as memory devices and logic circuits, as well as in future semiconductor devices beyond the silicon roadmap, such as nanow...
Inhaltsverzeichnis
1) Introduction
2) RTS phenomenology
a. RTS time constants
i. Shockley-Read-Hall framework
ii. Trap energy, capture barrier and location from SRH approach
...
Über den Autor
Eddy Simoen is Senior Researcher at imec and Professor at Ghent University, Belgium.
Cor Claeys is Director of Advanced Semiconductor Technologies at imec, and Prof...
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