This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.
Inhaltsverzeichnis
Introduction to levitation micro-systems.- Micro-fabrication techniques.- Analytical modelling.- Quasi-finite element modelling.- Inductive levitation micro-systems.- Hybrid levitation micro-systems.- Mechanical thermal noise in levitated micro-gyroscopes.
Über den Autor
Kirill Poletkin obtained his
Ph.D. degree at Moscow Aviation Institute (Moscow State Aviation Technological University), Russia in 2007. Since 2016, he is a scientist at Karlsruhe Institute of Technology as a scientist.
In 2020, he is also appointed as an assistant professor at Innopolis University. His research interest includes micro- and nano-scales electromechanical devices and processes of the energy transfer within these scales.
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