Autor: Piet Bergveld

The MESA Research Institute of the University of Twente was created in 1990 through the joining of the research unit Sensors and Actuators with the department of Microelectronics. The multidisciplina …

In the rapidly developing information society there is an ever-growing demand for information-supplying elements or sensors. The technology to fabricate such sensors has grown in the past few decades …

After earlier meetings in Enschede (NL, 1994), Basel (CH, 1996) and Banff (CDN, 1998), mu TAS 2000 is the fourth international symposium on the subject of miniaturized techniques, methods, devices an …