Autor: Toshiyuki Tsuchiya

Soporte
Osamu Tabata is Professor in the Department of Microengineering at Kyoto University. He received his MSc and Ph D degrees from Nagoya Institute of Technology. From 1981 to 1996, he performed industrial research at Toyota Central Research and Development Laboratories in Aichi, Japan. He joined the Department of Mechanical Engineering of Ritsumeikan University in Shiga, Japan, in 1996, and the Department of Mechanical Engineering at Kyoto University in 2003. Osamu Tabata is engaged in the research of micro/nano processes, MEMS and micro/nano system synthetic engineering. He received numerous awards, including the Science News Award and the Research & Development Top 100 Award in 1993 and 1998. Toshiyuki Tsuchiya is Assistant Professor in the Department of Microengineering at Kyoto University. He received his Ph D from Nagoya University, Japan, in 2002. From 1993 to 2004, he carried out industrial research at Toyota Central Research and Development Laboratories in Aichi, Japan. In 2004, he joined the Department of Mechanical Engineering of Kyoto University. Toshiyuki Tsuchiya»s current research is focused on mechanical properties evaluation of micro/nano materials and MEMS and micro/nano system synthetic engineering.




1 Ebooks de Toshiyuki Tsuchiya

Osamu Tabata & Toshiyuki Tsuchiya: Reliability of MEMS
This edition of ‘Reliability of MEMS’ was originally published in the successful series ‘Advanced Micro & Nanosystems’. Here, one of the most important hurdles to commercialization for microelectrome …
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