Electrospraying utilizes electrical forces for liquid atomization. Droplets obtained by this method are highly charged, to about half of the Rayleigh limit. The advantage of electrospraying is that the droplets can be extremely small, down to the order of 10’s nanometres, and the charge and size of the droplets can be controlled to some extent by electrical means. The application of electrospray technology for thin solid film devices is presented in this book. This book focuses on thin inorganic film deposition for solar cells, fuel cells, lithium batteries, supercapacitors, gas sensors production.