Taken as a whole, this series covers all major fields of application for commercial sensors, as well as their manufacturing techniques and major types. As such the series does not treat bulk sensors, but rather places strong emphasis on microsensors, microsystems and integrated electronic sensor packages. Each of the individual volumes is tailored to the needs and queries of readers from the relevant branch of industry.
An international team of experts from the leading companies in this field gives a detailed picture of existing as well as future applications. They discuss in detail current technologies, design and construction concepts, market considerations and commercial developments. Topics covered include vehicle safety, fuel consumption, air conditioning, emergency control, traffic control systems, and electronic guidance using radar and video.
Daftar Isi
Overview
Market
Measurement Principles
Design Methodology
– Methodology
– CAD-Tools for MEMS
Technology
– Bulk Micromachining
– Surface Micromachining Integrated
-Surface Micromachining Discrete
– Thin Film On Steel
– Thin Film on Si
– Ceramic/ Chemical
– Magnetic
– Assembly Packaging
– Reliability
– Testing
Evaluation Circuits
– Capacitive
– Resistive
Applications
– Acceleration
– Yaw Rate
– Pressure
– High Pressure
– Temperature
– Mass Flow
– Radar
– Video
– Wheel Speed
– Cam/ Crank Angle
– Steering Angle
– Momentum/ Force
– Light
– Rain
– Chemical Sensors Oxygen
– Chem. Sensors Emissions (NOx)
– Chemical Sensors Air Quality
– Chemical Sensors Fluid Media
– Electric Current
– Tire Pressure
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