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Jie Zhang 
Wafer Fabrication [EPUB ebook] 
Automatic Material Handling System

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Cover of Jie Zhang: Wafer Fabrication (ePUB)

This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.

€164.95
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About the author

Jie Zhang, Shanghai Jiaotong University, Shanghai, China

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Language English ● Format EPUB ● Pages 284 ● ISBN 9783110487237 ● File size 15.8 MB ● Publisher De Gruyter ● City Berlin/Boston ● Published 2018 ● Edition 1 ● Downloadable 24 months ● Currency EUR ● ID 6965986 ● Copy protection Adobe DRM
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