Lithography, the fundamental fabrication process of semiconductor devices, has been playing a critical role in micro-nonfabrication technologies and manufacturing of integrated circuits (IC). Optical lithography was the first and the earliest microfabrication technology used in semiconductor IC manufacturing. It is still the main tool of lithography in today’s very large scale integrated circuits and MEMS. This book presents topical research from across the globe in the study of lithography; its principles, processes and materials. Topics discussed herein include nanofabrication in electron beam lithography; submicron gratings prepared by laser interference lithography; thermal electric field imprinting lithography; local anodic oxidation and other alternative lithography techniques; as well as nanosphere lithography to enable plasmonic applications.
Theodore C Hennessy
Lithography [PDF ebook]
Principles, Processes and Materials
Lithography [PDF ebook]
Principles, Processes and Materials
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Format PDF ● Pagini 296 ● ISBN 9781611221237 ● Editor Theodore C Hennessy ● Editura Nova Science Publishers ● Publicat 2017 ● Descărcabil 3 ori ● Valută EUR ● ID 7218126 ● Protecție împotriva copiilor Adobe DRM
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