Sergey Edward Lyshevski 
MEMS and NEMS [PDF ebook] 
Systems, Devices, and Structures

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The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including transducers, switches, logic...

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Language English ● Format PDF ● Pages 461 ● ISBN 9781420040517 ● Publisher CRC Press ● Published 2018 ● Downloadable 3 times ● Currency EUR ● ID 5698049 ● Copy protection Adobe DRM
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