J Paulo Davim 
Micro and Nanomanufacturing Research [PDF ebook] 

Nowadays, the use of microcomponents and miniaturized functional products from metals, polymers, ceramics, composites and advanced materials has increased in various areas of science and technology due to their special properties, with applications in microelectronic, biomedical, aircraft, automotive, defence and aerospace, as well other advanced industries. This book reviews research developments in micro and nanomanufacturing, such as manufacturing and fabrication techniques in nano, micro and meso scales; micro scale metal cutting; micro and nano abrasive machining; laser micro-machining; micro EDM; micro forming processes and lithographyc processes.