Cor Claeys & Eddy Simoen 
Metal Impurities in Silicon- and Germanium-Based Technologies [PDF ebook] 
Origin, Characterization, Control, and Device Impact

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This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices’ performance. Several control and possible gettering approaches are addressed.

 

The book offers a valuable reference guide for all researchers...

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€171.19
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İçerik tablosu

Preface.- Introduction.- Basic Properties of Metals in Semiconductors.- Sources of Metals in Si and Ge Processing.- Characterization and Detection of Metals in Silico...

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Yazar hakkında

Cor Claeys is a Professor at the KU Leuven (Belgium) since 1990. He was at imec, Leuven, Belgium from 1984 till 2016. His main interests are silicon technology, ...

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Dil İngilizce ● Biçim PDF ● Sayfalar 438 ● ISBN 9783319939254 ● Dosya boyutu 14.9 MB ● Yayımcı Springer International Publishing ● Kent Cham ● Ülke CH ● Yayınlanan 2018 ● İndirilebilir 24 aylar ● Döviz EUR ● Kimlik 6457120 ● Kopya koruma Sosyal DRM

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