Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication. – Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology- Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components- Assesses the best techniques for repairing micro-defects
Wei Gao
Surface Metrology for Micro- and Nanofabrication [EPUB ebook]
Surface Metrology for Micro- and Nanofabrication [EPUB ebook]
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Мова Англійська ● Формат EPUB ● ISBN 9780128178515 ● Видавець Elsevier Science ● Опубліковано 2020 ● Завантажувані 3 разів ● Валюта EUR ● Посвідчення особи 7460334 ● Захист від копіювання Adobe DRM
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