Liquid-Phase Epitaxy (LPE) is a technique used in the bulk growth
of crystals, typically in semiconductor manufacturing, whereby the
crystal is grown from a rich solution of the semiconductor onto a
substrate in layers, each of which is formed by supersaturation or
cooling. At least 50% of growth in the optoelectronics area is
currently focussed on LPE.
This book covers the bulk growth of semiconductors, i.e.
silicon, gallium arsenide, cadmium mercury telluride, indium
phosphide, indium antimonide, gallium nitride, cadmium zinc
telluride, a range of wide-bandgap II-VI compounds, diamond and
silicon carbide, and a wide range of oxides/fluorides (including
sapphire and quartz) that are used in many industrial applications.
A separate chapter is devoted to the fascinating field of growth in
various forms of microgravity, an activity that is approximately
30-years old and which has revealed many interesting features, some
of which have been very surprising to experimenters and
theoreticians alike.
* Covers the most important materials within the field
* The contributors come from a wide variety of countries and
include both academics and industrialists, to give a balanced
treatment
* Builds-on an established series known in the community
* Highly pertinent to current and future developments in
telecommunications and computer-processing industries.
Mục lục
Series Preface.
Preface.
Acknowledgements.
List of Contributors.
1. Introduction to Liquid Phase Epitaxy (Hans J. Scheel)
2. Liquid Phase Epitaxy in Russia Prior to 1990 (V.A.
Mishurnyi)
3. Phase Diagrams and Modeling in Liquid Phase Epitaxy (Kazuo
Nakajima)
4. Equipment and Instrumentation for Liquid Phase Epitaxy
(Michael G. Mauk and James B. Mc Neely)
5. Silicon, Germanium and Silicon-Germanium Liquid Phase Epitaxy
(Michael G. Mauk)
6. Liquid Phase Epitaxy of Silicon Carbide (R. Yakimova and M.
Syvajarvi)
7. Liquid Phase Epitaxy of Gallium Nitride (Hans J. Scheel and
Dennis Elwell)
8. Liquid Phase Epitaxy of Quantum Wells and Quantum Dots (A.
Krier, X.L. Huang and Z. Labadi)
9. Liquid Phase Epitaxy of Hg1-x CDx Te
(MCT) (P. Capper)
10. Liquid Phase Epitaxy of Widegap II-VIs (J.F. Wang and M.
Isshiki)
11. Liquid Phase Epitaxy of Garnets (Taketoshi Hibiya and Peter
Gornert)
12. Liquid Phase Epitaxy: A Survey of Capabilities, Recent
Developments and Specialized Applications (Michael G. Mauk)
13. Liquid Phase Epitaxy for Light Emitting Diodes (Michael G.
Mauk)
Index.
Giới thiệu về tác giả
Dr. Peter Capper is a Materials Team Leader at BAE Systems Infrared Ltd., in Southampton, UK.
Michael Mauk is the editor of Liquid Phase Epitaxy of Electronic, Optical and Optoelectronic Materials, published by Wiley.