Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices.
Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices.
Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a Ph D student in Prof. Yafei Zhang’s research group.
Table of Content
Introduction.- Propagation of Acoustic Wave in Crystals.- The Theory of FBAR.- The Sputtering Deposition and Etching of Al N Film.- The Membrane Structured FBAR.- Solidly Mounted Acoustic Resonator.- The Application of FBAR in RF Filters.- The FBAR Excited by Lateral Filed.- High Sensitive Sensors Based on FBAR.
About the author
Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology. He received his Ph D in condensed physics from Lanzhou University of China in 1994. His expertise includes integrated circuits, sensors, field effect transistor construction, solar cells, synthesis and processing of carbon nanotubes, Si nanowires and Si C nanowhiskers, and nanodevices. He has 50 patents and has published 3 books and over 260 papers. He received the National Natural Science Award of China in 2005, and has held more than 20 invited talks at international conferences or institutions. He has also served on the organizing committee for 2 Journals. Dr. Da Chen was a Ph.D. student in Prof. Yafei Zhang’s research group.
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