Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts and pioneers in the field, MEMS: Design and Fabrication presents a comprehensive look at the materials, procedures, tools, and techniques of MEMS fabrication. New chapters in this edition examine the materials and fabrication of polymer microsystems and optical diagnostics for investigating the entrance length in microchannels. Rigorous yet accessible, this volume provides the practical knowledge needed for work in cutting-edge MEMS applications.
€103.44
购买此电子书可免费获赠一本！
格式 PDF ● 网页 664 ● ISBN 9781420036565 ● 编辑 Mohamed Gad-el-Hak ● 出版者 CRC Press ● 发布时间 2005 ● 下载 3 时 ● 货币 EUR ● ID 5697726 ● 复制保护 Adobe DRM
需要具备DRM功能的电子书阅读器
来自同一作者的更多电子书 / 编辑
96,238 此类电子书
