This book reviews advances in cutting-edge micro-/nano-electrometers, and discusses the technological challenges involved in their practical implementation. The detection of electrostatic charge has a wide range of applications in ionization chambers, bio-analyte and aerosol particle instruments, mass spectrometers, scanning tunneling microscopes, and even quantum computers. Designing micro-/nano-electrometers (also known as charge sensors) for electrometry is considered vital because of the charge sensitivity and resolution issues at micro-/nano-scales. The remarkably dynamic microelectromechanical systems (MEMSs)/nanoelectromechanical systems (NEMSs), and advances in solid-state electronics, hold considerable potential for the design and fabrication of extremely sensitive charge sensors.
表中的内容
Introduction.- Noises in electrometers.- Commercial solid-state electrometer.- Mesoscopic SET electrometer.- NEMS based resonant electrometer.- MEMS based resonant electrometer .- MEMS based resonant electrometer.- Vibrating-reed electrometer.- Vibrating-reed electrometer.- Electrometer applications.
关于作者
Dr Yong Zhu is a full member of Queensland Micro- and Nanotechnology Centre (QMNC), and a senior lecturer in Electrical and Electronic Engineering at Griffith University, Australia. In 2005, He was conferred his Ph D degree in Microelectronics and Solid State Electronics from Peking University, China. In 2006, Dr Zhu received a Postdoctoral Fellowship from the Department of Engineering, University of Cambridge, UK, where he developed high-precision MEMS electrometer, mass balance and radio frequency resonator. From 2008 to 2011, he was a Research Academic at the School of Electrical Engineering and Computer Science, the University of Newcastle, Australia.His research focuses on MEMS and NEMS devices, including MEMS electrometer, Si C-based sensor, power harvester, nanopositioner, microactuator, biomedical sensors, radio frequency devices, etc.
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