Commission on Engineering and Technical Systems & Committee on Beam Technologies: Opportunities in Attaining Fully Integrated Processing Systems 
Beam Technologies for Integrated Processing [PDF ebook] 

Beam technologies play an important role in microelectronic component fabrication and offer opportunities for application in other manufacturing schemes. Emerging beam technologies that incorporate potential for sensors, control, and information processing have created new opportunities for integrated processing of materials and components.This volume identifies various beam technologies and their applications in electronics and other potential manufacturing processes. Recommendations for research and development to enhance the understanding, capabilities, and applications of beam technologies are presented.