1 كتب إلكترونية بواسطة Japan) Sato Kazuo (Nagoya University
Prem Pal & Kazuo (Nagoya University, Japan) Sato: Silicon Wet Bulk Micromachining for MEMS
Microelectromechanical systems (MEMS)-based sensors and actuators have become remarkably popular in the past few decades. Rapid advances have taken place in terms of both technologies and techniques …
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