1 Ebooks by Japan) Sato Kazuo (Nagoya University
Prem Pal & Kazuo (Nagoya University, Japan) Sato: Silicon Wet Bulk Micromachining for MEMS
Microelectromechanical systems (MEMS)-based sensors and actuators have become remarkably popular in the past few decades. Rapid advances have taken place in terms of both technologies and techniques …
EPUB
DRM
€127.13
