Mariana Amorim Fraga 
Amorphous Silicon Carbide Thin Films [PDF ebook] 
Deposition, Characterization, Etching and Piezoresistive Sensors Applications

Silicon carbide (Si C) has been described as a suitable semiconductor material to use in MEMS and electronic devices for harsh environments. In recent years, many developments in Si C technology as bulk growth, materials processing, electronic devices and sensors have been shown. Moreover, some studies show the synthesis, characterization and processing of crystalline Si C films. However, few works have investigated the potential of amorphous silicon carbide (a-Si C) thin films for sensors applications. This book presents fundamentals of amorphous silicon carbide thin films and their applications in piezoresistive sensors for high temperature applications.