Silicon carbide (Si C) has been described as a suitable semiconductor material to use in MEMS and electronic devices for harsh environments. In recent years, many developments in Si C technology as bulk growth, materials processing, electronic devices and sensors have been shown. Moreover, some studies show the synthesis, characterization and processing of crystalline Si C films. However, few works have investigated the potential of amorphous silicon carbide (a-Si C) thin films for sensors applications. This book presents fundamentals of amorphous silicon carbide thin films and their applications in piezoresistive sensors for high temperature applications.
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स्वरूप PDF ● पेज 118 ● ISBN 9781613249123 ● संपादक Mariana Amorim Fraga ● प्रकाशक Nova Science Publishers ● प्रकाशित 2016 ● डाउनलोड करने योग्य 3 बार ● मुद्रा EUR ● आईडी 7218854 ● कॉपी सुरक्षा Adobe DRM
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