Autor: Committee on Beam Technologies: Opportunities in Attaining Fully Integrated Processing Systems

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Commission on Engineering and Technical Systems & Committee on Beam Technologies: Opportunities in Attaining Fully Integrated Processing Systems: Beam Technologies for Integrated Processing
Beam technologies play an important role in microelectronic component fabrication and offer opportunities for application in other manufacturing schemes. Emerging beam technologies that incorporate p …
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Englisch
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€19.26