Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules.
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Format PDF ● Pages 944 ● ISBN 9781351406437 ● Editor Tadahiro Ohmi ● Publisher CRC Press ● Published 2017 ● Downloadable 3 times ● Currency EUR ● ID 5532476 ● Copy protection Adobe DRM
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