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Anthony C. Jones & Paul O’Brien
CVD of Compound Semiconductors [PDF ebook]
Precursor Synthesis, Development and Applications

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的封面 Anthony C. Jones & Paul O'Brien: CVD of Compound Semiconductors (PDF)

Metallorganische Precursormoleküle sind zur Herstellung von dünnen, hochreinen Schichten für Elektronikbauelemente unentbehrlich. Dieses Handbuch behandelt die Herstellung und Struktur der Precursor und ihre Anwendung in CVD-Prozessen zur Herstellung von Verbindungshalbleitern.

Unter anderem werden behandelt:

* Strategien und Techniken zur Herstellung von Verbindungshalbleitern
* Metallorganische Precursormoleküle für III-V MOVPE
* Metallorganische Precursormoleküle für II-VI MOVPE
* Einkomponentenvorstufen
* CBE-Technik
* ALE-Technik

Eine Reihe von Glossarien und ein ausführliches Literaturverzeichnis runden dieses umfassende Werk ab. Dieses Buch ist für Chemiker, Physiker, Ingenieure und Materialwissenschaftler, die sich mit der Materialentwicklung dünner Schichten befassen, zu empfehlen.

€160.99

表中的内容

Basic Electronics
Introduction to Vapor-Phase Epitaxy
MOCVD
ALE
CBE
Precursor Chemistry
General Classes
Synthesis/Purification
Effects of Trace Impurities on Layer Properties
Deposition of III-V Semiconductors
MOCVD
ALE
CBE
Deposition of II-VI Semiconductors
MOCVD
ALE
Future Prospects

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语言英语 ● 格式 PDF ● 网页 338 ● ISBN 9783527614622 ● 文件大小 19.3 MB ● 出版者 Wiley-VCH ● 发布时间 2008 ● 版 1 ● 下载 24 个月 ● 货币 EUR ● ID 2440888 ● 复制保护 Adobe DRM

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