电子书 > 科学 > 物理/天文学 > Paul S. Ho & Wei William Lee: Low Dielectric Constant Materials for IC Applications (PDF)

Paul S. Ho & Wei William Lee
Low Dielectric Constant Materials for IC Applications [PDF ebook]

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的封面 Paul S. Ho & Wei William Lee: Low Dielectric Constant Materials for IC Applications (PDF)

Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-k) materials technology, thin film materials characterization, integration and reliability for back-end interconnects and packaging applications in microelectronics. Highly informative contributions from leading academic and industrial laboratories provide comprehensive information about materials technologies for < 0.18 um process technology. Topics include: Organic dielectric materials, Inorganic dielectric materials, Composite dielectric materials, Metrology and characterization techniques, Integration, Reliability. This volume will be an invaluable resource for professionals, scientists, researchers and graduate students involved in dielectric technology development, materials science, polymer science, and semiconductor devices and processing.

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语言英语 ● 格式 PDF ● ISBN 9783642559082 ● 编辑 Paul S. Ho & Wei William Lee ● 出版者 Springer Berlin Heidelberg ● 发布时间 2012 ● 下载 3 时 ● 货币 EUR ● ID 6326766 ● 复制保护 Adobe DRM

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