Catalog > Sciences > Engineering / Technics > Miscellaneous > D.O Filatov: Two-Dimensional Periodic Nanoscale Patterning of Solid Surfaces by Four-Beam Standing Wave Excimer Laser Lithography (K) (PDF)

D.O Filatov
Two-Dimensional Periodic Nanoscale Patterning of Solid Surfaces by Four-Beam Standing Wave Excimer Laser Lithography (K) [PDF ebook]

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Cover of D.O Filatov: Two-Dimensional Periodic Nanoscale Patterning of Solid Surfaces by Four-Beam Standing Wave Excimer Laser Lithography (K) (PDF)

This book presents and discusses a promising technology for fabrication of the one- and two-dimensional nanoperiodic structures on the solid surfaces by direct two- and four-beam standing wave pulsed laser modification. This method being developed extensively at present is very promising for application in nanoelectronics, data storage, integrated optics, and is considered to be a promising alternative to X-ray lithography in a wide range of applications.

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Format PDF ● Pages 97 ● ISBN 9781617280993 ● Editor D.O Filatov ● Publisher Nova Science Publishers ● Published 2016 ● Downloadable 3 times ● Currency EUR ● ID 7219628 ● Copy protection Adobe DRM

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