D.O Filatov 
Two-Dimensional Periodic Nanoscale Patterning of Solid Surfaces by Four-Beam Standing Wave Excimer Laser Lithography (K) [PDF ebook] 

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This book presents and discusses a promising technology for fabrication of the one- and two-dimensional nanoperiodic structures on the solid surfaces by direct two- and four-beam standing wave pulsed laser modification. This method being developed extensively at present is very promising for application in nanoelectronics, data storage, integrated optics, and is considered to be a promising alternative to X-ray lithography in a wide range of applications.

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格式 PDF ● 网页 97 ● ISBN 9781617280993 ● 编辑 D.O Filatov ● 出版者 Nova Science Publishers ● 发布时间 2016 ● 下载 3 时 ● 货币 EUR ● ID 7219628 ● 复制保护 Adobe DRM
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