D.O Filatov 
Two-Dimensional Periodic Nanoscale Patterning of Solid Surfaces by Four-Beam Standing Wave Excimer Laser Lithography (K) [PDF ebook] 

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This book presents and discusses a promising technology for fabrication of the one- and two-dimensional nanoperiodic structures on the solid surfaces by direct two- and four-beam standing wave pulsed laser modification. This method being developed extensively at present is very promising for application in nanoelectronics, data storage, integrated optics, and is considered to be a promising alternative to X-ray lithography in a wide range of applications.

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Format PDF ● Strony 97 ● ISBN 9781617280993 ● Redaktor D.O Filatov ● Wydawca Nova Science Publishers ● Opublikowany 2016 ● Do pobrania 3 czasy ● Waluta EUR ● ID 7219628 ● Ochrona przed kopiowaniem Adobe DRM
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