Nanopositioning Technologies

Changhai Ru & Xinyu Liu

Changhai Ru & Xinyu Liu
Nanopositioning Technologies [PDF ebook]
Fundamentals and Applications

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Cover von Changhai Ru & Xinyu Liu: Nanopositioning Technologies (PDF)

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

€96.29

Inhaltsverzeichnis

1.A review of Stick-Slip Nanopositioning Actuators.- 2. Piezoelectric Motor Technology – A Review.- 3.Design of High-speed Nanopositioning Systems.- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism.- 5.Electro-magnetic Nano Positioning.- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis.- 7. Tracking Control for Nanopositioning.- 8.Position Sensors for Nanopositioning.- 9. MEMS Nanopositioners.- 10.Control Issues of MEMS nanopositioning devices.- 11. A Review of Nanomanipulation in Scanning Electron Microscopes.- 12. Nanopositioning for lithography and data storage.

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Sprache Englisch ● Format PDF ● Seiten 409 ● ISBN 9783319238531 ● Dateigröße 18.6 MB ● Herausgeber Changhai Ru & Xinyu Liu ● Verlag Springer International Publishing ● Ort Cham ● Land CH ● Erscheinungsjahr 2015 ● herunterladbar 24 Monate ● Währung EUR ● ID 4814877 ● Kopierschutz Soziales DRM

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