Changhai Ru & Xinyu Liu 
Nanopositioning Technologies [PDF ebook] 
Fundamentals and Applications

Sokongan

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

€96.29
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Jadual kandungan

1.A review of Stick-Slip Nanopositioning Actuators.- 2. Piezoelectric Motor Technology – A Review.- 3.Design of High-speed Nanopositioning Systems.- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism.- 5.Electro-magnetic Nano Positioning.- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis.- 7. Tracking Control for Nanopositioning.- 8.Position Sensors for Nanopositioning.- 9. MEMS Nanopositioners.- 10.Control Issues of MEMS nanopositioning devices.- 11. A Review of Nanomanipulation in Scanning Electron Microscopes.- 12. Nanopositioning for lithography and data storage.

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Bahasa Inggeris ● Format PDF ● Halaman-halaman 409 ● ISBN 9783319238531 ● Saiz fail 18.6 MB ● Penyunting Changhai Ru & Xinyu Liu ● Penerbit Springer International Publishing ● Bandar raya Cham ● Negara CH ● Diterbitkan 2015 ● Muat turun 24 bulan ● Mata wang EUR ● ID 4814877 ● Salin perlindungan Social DRM

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