Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.
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Idioma Inglés ● Formato PDF ● ISBN 9781489918048 ● Editorial Springer US ● Publicado 2013 ● Descargable 3 veces ● Divisa EUR ● ID 4652091 ● Protección de copia Adobe DRM
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