Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.
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Bahasa Inggeris ● Format PDF ● ISBN 9781489918048 ● Penerbit Springer US ● Diterbitkan 2013 ● Muat turun 3 kali ● Mata wang EUR ● ID 4652091 ● Salin perlindungan Adobe DRM
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