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S. Coffa & G. Ferla
Ion Implantation Technology – 94 [PDF ebook]

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Couverture du S. Coffa & G. Ferla: Ion Implantation Technology - 94 (PDF)

The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas as diverse as materials science, device production and advanced ion implanters.The contents open with a paper on the future developments of the microelectronics industry in Europe within the framework of the global competition. The subsequent invited and oral presentations cover in detail the following areas: trends in processing and devices, ion-solid interaction, materials science issues, advanced implanter systms, process control and yield, future trends and applications.

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Langue Anglais ● Format PDF ● ISBN 9780444599728 ● Éditeur S. Coffa & G. Ferla ● Maison d’édition Elsevier Science ● Publié 1995 ● Téléchargeable 6 fois ● Devise EUR ● ID 2637866 ● Protection contre la copie Adobe DRM

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