The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas as diverse as materials science, device production and advanced ion implanters.The contents open with a paper on the future developments of the microelectronics industry in Europe within the framework of the global competition. The subsequent invited and oral presentations cover in detail the following areas: trends in processing and devices, ion-solid interaction, materials science issues, advanced implanter systms, process control and yield, future trends and applications.
€248.70
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भाषा अंग्रेज़ी ● स्वरूप PDF ● ISBN 9780444599728 ● संपादक S. Coffa & G. Ferla ● प्रकाशक Elsevier Science ● प्रकाशित 1995 ● डाउनलोड करने योग्य 6 बार ● मुद्रा EUR ● आईडी 2637866 ● कॉपी सुरक्षा Adobe DRM
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