หนังสือดิจิตอล > วิทยาศาสตร์ > คณิตศาสตร์ > Norman G. Einspruch & R. K. Watts: Lithography for VLSI (PDF)

Norman G. Einspruch & R. K. Watts
Lithography for VLSI [PDF ebook]
VLSI Electronics Microstructure Science

สนับสนุน

ปกของ Norman G. Einspruch & R. K. Watts: Lithography for VLSI (PDF)

VLSI Electronics Microstructure Science, Volume 16: Lithography for VLSI treats special topics from each branch of lithography, and also contains general discussion of some lithographic methods. This volume contains 8 chapters that discuss the various aspects of lithography. Chapters 1 and 2 are devoted to optical lithography. Chapter 3 covers electron lithography in general, and Chapter 4 discusses electron resist exposure modeling. Chapter 5 presents the fundamentals of ion-beam lithography. Mask/wafer alignment for x-ray proximity printing and for optical lithography is tackled in Chapter 6. Chapters 7 and 8 on metrology deal with the characterization of lithography by measurements of various types. Engineers, scientists, and technical managers in the semiconductor industry, and engineering and applied physics faculty and graduate students will find the text very useful.

€56.59

ซื้อ eBook เล่มนี้และรับฟรีอีก 1 เล่ม!

ภาษา อังกฤษ ● รูป PDF ● ISBN 9781483217826 ● บรรณาธิการ Norman G. Einspruch & R. K. Watts ● สำนักพิมพ์ Elsevier Science ● การตีพิมพ์ 2014 ● ที่สามารถดาวน์โหลดได้ 3 ครั้ง ● เงินตรา EUR ● ID 5733464 ● ป้องกันการคัดลอก Adobe DRM

ต้องใช้เครื่องอ่านหนังสืออิเล็กทรอนิกส์ที่มีความสามารถ DRM

หนังสืออิเล็กทรอนิกส์เพิ่มเติมจากผู้แต่งคนเดียวกัน / บรรณาธิการ

Norman G. Einspruch R. K. Watts

48,816 หนังสืออิเล็กทรอนิกส์ในหมวดหมู่นี้

ปกของ Don Redmond: Number Theory

Don Redmond: Number Theory

This text provides a detailed introduction to number theory, demonstrating how other areas of mathematics enter into the study of the properties of natural numbers. It contains problem sets within ea …

ปกของ Vidyadhar S. (Michigan State University, East Lansing, USA) Mandrekar & David A. (Indiana University-Purdue University, Fort Wayne) Redett: Weakly Stationary Random Fields, Invariant Subspaces and Applications

Vidyadhar S. (Michigan State University, East Lansing, USA) Mandrekar & David A. (Indiana University-Purdue University, Fort Wayne) Redett: Weakly Stationary Random Fields, Invariant Subspaces and Applications

The first book to examine weakly stationary random fields and their connections with invariant subspaces (an area associated with functional analysis). It reviews current literature, presents central …

ปกของ Marius Durea & Radu Strugariu: An Introduction to Nonlinear Optimization Theory

Marius Durea & Radu Strugariu: An Introduction to Nonlinear Optimization Theory

The goal of this book is to present the main ideas and techniques in the field of continuous smooth and nonsmooth optimization. Starting with the case of differentiable data and the classical results …

ปกของ P. Mohana Shankar: Differential Equations

P. Mohana Shankar: Differential Equations

The book takes a problem solving approach in presenting the topic of differential equations. It provides a complete narrative of differential equations showing the theoretical aspects of the problem …

ปกของ John (CUNY & College of Staten Island, New York, USA) Verzani: Using R for Introductory Statistics

John (CUNY & College of Staten Island, New York, USA) Verzani: Using R for Introductory Statistics

The second edition of a bestselling textbook, Using R for Introductory Statistics guides students through the basics of R, helping them overcome the sometimes steep learning curve. The author does th …

ปกของ R Costa & A. Grichkov: NonasSociative Algebra and Its Applications

R Costa & A. Grichkov: NonasSociative Algebra and Its Applications

A collection of lectures presented at the Fourth International Conference on Nonassociative Algebra and its Applications, held in Sao Paulo, Brazil. Topics in algebra theory include alternative, Bern …

ปกของ Yunho Hwang & Reinhard Radermacher: Vapor Compression Heat Pumps with Refrigerant Mixtures

Yunho Hwang & Reinhard Radermacher: Vapor Compression Heat Pumps with Refrigerant Mixtures

Amidst tightening requirements for eliminating CFC”s, HCFC”s, halons, and HFC”s from use in air conditioning and heat pumps, the search began for replacements that are environmentally benign, non- …

ปกของ Kjell Johnson & Max Kuhn: Feature Engineering and Selection

Kjell Johnson & Max Kuhn: Feature Engineering and Selection

The process of developing predictive models includes many stages. Most resources focus on the modeling algorithms but neglect other critical aspects of the modeling process. This book describes techn …

ปกของ V. Lakshmikantham: Method of Variation of Parameters for Dynamic Systems

V. Lakshmikantham: Method of Variation of Parameters for Dynamic Systems

Method of Variation of Parameters for Dynamic Systems presents a systematic and unified theory of the development of the theory of the method of variation of parameters, its unification with Lyapunov …

ปกของ Willi (Technical University of Kaiserslautern, Germany) Freeden & M. Zuhair Nashed: Lattice Point Identities and Shannon-Type Sampling

Willi (Technical University of Kaiserslautern, Germany) Freeden & M. Zuhair Nashed: Lattice Point Identities and Shannon-Type Sampling

Lattice Point Identities and Shannon-Type Sampling demonstrates that significant roots of many recent facets of Shannon”s sampling theorem for multivariate signals rest on basic number-theoretic res …

หน้าต่อไป >>>