Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules.
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格式 EPUB ● 网页 944 ● ISBN 9781351406420 ● 编辑 Tadahiro Ohmi ● 出版者 CRC Press ● 发布时间 2017 ● 下载 3 时 ● 货币 EUR ● ID 5532475 ● 复制保护 Adobe DRM
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