Catalog > Sciences > Engineering / Technics > Electronics, Electrical Engineering, Communications Engineering > David Weinberger: Polysilizium-Heaterstrukturen für den Einsatz in hochbeschleunigten Zuverlässigkeitstests auf Waferebene (PDF)

David Weinberger
Polysilizium-Heaterstrukturen für den Einsatz in hochbeschleunigten Zuverlässigkeitstests auf Waferebene [PDF ebook]

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Cover of David Weinberger: Polysilizium-Heaterstrukturen für den Einsatz in hochbeschleunigten Zuverlässigkeitstests auf Waferebene (PDF)

Bachelorarbeit aus dem Jahr 2011 im Fachbereich Elektrotechnik, Note: 1, Hochschule Mittweida (FH) (Elektro- und Informationstechnik), Sprache: Deutsch, Abstract: Diese Bachelorarbeit soll die Grundlage für hochbeschleunigte Zuverlässigkeitstests auf Waferebene unter Verwendung von In-Situ-Heizelementen aus polykristallinem Silizium bilden. Nach einer Einführung in die Zuverlässigkeitstheorie wird eine Auswahl an Zuverlässigkeitstest vorgestellt. Diese sind momentan, durch den Einsatz von Hot-Chuck’s, noch recht zeitaufwändig und verlangen daher nach einer alternativen Wärmequelle. Der in dieser Arbeit vorgestellte Ausweg beschreibt einen Polysilizium-Widerstand direkt in der zu beheizenden Struktur. Weiterhin wird die Wärmeausbreitung durch thermische Simulationen dargestellt. Am Ende dieser Arbeit wird noch die mögliche Temperaturmessung an solchen Teststrukturen vorgestellt.

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Language German ● Format PDF ● Pages 78 ● ISBN 9783656276203 ● File size 23.1 MB ● Publisher GRIN Verlag ● City München ● Country DE ● Published 2012 ● Edition 1 ● Downloadable 24 months ● Currency EUR ● ID 3952557 ● Copy protection without

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