电子书 > 科学 > 工程/技术 > 电子，电气工程 > David Weinberger: Polysilizium-Heaterstrukturen für den Einsatz in hochbeschleunigten Zuverlässigkeitstests auf Waferebene (PDF)

David Weinberger
Polysilizium-Heaterstrukturen für den Einsatz in hochbeschleunigten Zuverlässigkeitstests auf Waferebene [PDF ebook]

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的封面 David Weinberger: Polysilizium-Heaterstrukturen für den Einsatz in hochbeschleunigten Zuverlässigkeitstests auf Waferebene (PDF)

Bachelorarbeit aus dem Jahr 2011 im Fachbereich Elektrotechnik, Note: 1, Hochschule Mittweida (FH) (Elektro- und Informationstechnik), Sprache: Deutsch, Abstract: Diese Bachelorarbeit soll die Grundlage für hochbeschleunigte Zuverlässigkeitstests auf Waferebene unter Verwendung von In-Situ-Heizelementen aus polykristallinem Silizium bilden. Nach einer Einführung in die Zuverlässigkeitstheorie wird eine Auswahl an Zuverlässigkeitstest vorgestellt. Diese sind momentan, durch den Einsatz von Hot-Chuck’s, noch recht zeitaufwändig und verlangen daher nach einer alternativen Wärmequelle. Der in dieser Arbeit vorgestellte Ausweg beschreibt einen Polysilizium-Widerstand direkt in der zu beheizenden Struktur. Weiterhin wird die Wärmeausbreitung durch thermische Simulationen dargestellt. Am Ende dieser Arbeit wird noch die mögliche Temperaturmessung an solchen Teststrukturen vorgestellt.

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语言德语 ● 格式 PDF ● 网页 78 ● ISBN 9783656276203 ● 文件大小 23.1 MB ● 出版者 GRIN Verlag ● 市 München ● 国家 DE ● 发布时间 2012 ● 版 1 ● 下载 24 个月 ● 货币 EUR ● ID 3952557 ● 复制保护无

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