E-kitap > Bilim > Mühendislik / Teknik > Elektronik, Elektrik Mühendisliği > David Weinberger: Polysilizium-Heaterstrukturen für den Einsatz in hochbeschleunigten Zuverlässigkeitstests auf Waferebene (PDF)

David Weinberger
Polysilizium-Heaterstrukturen für den Einsatz in hochbeschleunigten Zuverlässigkeitstests auf Waferebene [PDF ebook]

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Örtmek David Weinberger: Polysilizium-Heaterstrukturen für den Einsatz in hochbeschleunigten Zuverlässigkeitstests auf Waferebene (PDF)

Bachelorarbeit aus dem Jahr 2011 im Fachbereich Elektrotechnik, Note: 1, Hochschule Mittweida (FH) (Elektro- und Informationstechnik), Sprache: Deutsch, Abstract: Diese Bachelorarbeit soll die Grundlage für hochbeschleunigte Zuverlässigkeitstests auf Waferebene unter Verwendung von In-Situ-Heizelementen aus polykristallinem Silizium bilden. Nach einer Einführung in die Zuverlässigkeitstheorie wird eine Auswahl an Zuverlässigkeitstest vorgestellt. Diese sind momentan, durch den Einsatz von Hot-Chuck’s, noch recht zeitaufwändig und verlangen daher nach einer alternativen Wärmequelle. Der in dieser Arbeit vorgestellte Ausweg beschreibt einen Polysilizium-Widerstand direkt in der zu beheizenden Struktur. Weiterhin wird die Wärmeausbreitung durch thermische Simulationen dargestellt. Am Ende dieser Arbeit wird noch die mögliche Temperaturmessung an solchen Teststrukturen vorgestellt.

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Dil Almanca ● Biçim PDF ● Sayfalar 78 ● ISBN 9783656276203 ● Dosya boyutu 23.1 MB ● Yayımcı GRIN Verlag ● Kent München ● Ülke DE ● Yayınlanan 2012 ● Baskı 1 ● İndirilebilir 24 aylar ● Döviz EUR ● Kimlik 3952557 ● Kopya koruma olmadan

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