David Weinberger 
Polysilizium-Heaterstrukturen für den Einsatz in hochbeschleunigten Zuverlässigkeitstests auf Waferebene [PDF ebook] 

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Обкладинка David Weinberger: Polysilizium-Heaterstrukturen für den Einsatz in hochbeschleunigten Zuverlässigkeitstests auf Waferebene (PDF)

Bachelorarbeit aus dem Jahr 2011 im Fachbereich Elektrotechnik, Note: 1, Hochschule Mittweida (FH) (Elektro- und Informationstechnik), Sprache: Deutsch, Abstract: Diese Bachelorarbeit soll die Grundlage für hochbeschleunigte Zuverlässigkeitstests auf Waferebene unter Verwendung von In-Situ-Heizelementen aus polykristallinem Silizium bilden. Nach einer Einführung in die Zuverlässigkeitstheorie wird eine Auswahl an Zuverlässigkeitstest vorgestellt. Diese sind momentan, durch den Einsatz von Hot-Chuck’s, noch recht zeitaufwändig und verlangen daher nach einer alternativen Wärmequelle. Der in dieser Arbeit vorgestellte Ausweg beschreibt einen Polysilizium-Widerstand direkt in der zu beheizenden Struktur. Weiterhin wird die Wärmeausbreitung durch thermische Simulationen dargestellt. Am Ende dieser Arbeit wird noch die mögliche Temperaturmessung an solchen Teststrukturen vorgestellt.

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Мова Німецька ● Формат PDF ● Сторінки 78 ● ISBN 9783656276203 ● Розмір файлу 23.1 MB ● Видавець GRIN Verlag ● Місто München ● Країна DE ● Опубліковано 2012 ● Видання 1 ● Завантажувані 24 місяців ● Валюта EUR ● Посвідчення особи 3952557 ● Захист від копіювання без

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