Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first Micro Electro Mechanical Systems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects
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Lingua Inglese ● Formato PDF ● Pagine 420 ● ISBN 9789004190955 ● Editore Michael T. Dugger & Seong H. Kim ● Casa editrice CRC Press ● Pubblicato 2011 ● Scaricabile 6 volte ● Moneta EUR ● ID 2613301 ● Protezione dalla copia Adobe DRM
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