Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first Micro Electro Mechanical Systems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects
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Language English ● Format PDF ● Pages 420 ● ISBN 9789004190955 ● Editor Michael T. Dugger & Seong H. Kim ● Publisher CRC Press ● Published 2011 ● Downloadable 6 times ● Currency EUR ● ID 2613301 ● Copy protection Adobe DRM
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