Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first Micro Electro Mechanical Systems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects
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Bahasa Inggeris ● Format PDF ● Halaman-halaman 420 ● ISBN 9789004190955 ● Penyunting Michael T. Dugger & Seong H. Kim ● Penerbit CRC Press ● Diterbitkan 2011 ● Muat turun 6 kali ● Mata wang EUR ● ID 2613301 ● Salin perlindungan Adobe DRM
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