Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.
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Bahasa Inggeris ● Format PDF ● ISBN 9783662094327 ● Penyunting Jarek Dabrowski & Eicke R. Weber ● Penerbit Springer Berlin Heidelberg ● Diterbitkan 2013 ● Muat turun 3 kali ● Mata wang EUR ● ID 6343377 ● Salin perlindungan Adobe DRM
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