Photomasks, the printing masters for the fabrication of integrated circuits, have become a necessity of modern semiconductor manufacturing. This book details the science and technology of industrial photo mask production, including fundamental principles, industrial production flows, and technological evolution.
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Language English ● Format PDF ● Pages 500 ● ISBN 9780071588911 ● Publisher McGraw-Hill Education ● Published 2005 ● Downloadable 6 times ● Currency EUR ● ID 2253383 ● Copy protection Adobe DRM
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