Photomasks, the printing masters for the fabrication of integrated circuits, have become a necessity of modern semiconductor manufacturing. This book details the science and technology of industrial photo mask production, including fundamental principles, industrial production flows, and technological evolution.
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Língua Inglês ● Formato PDF ● Páginas 500 ● ISBN 9780071588911 ● Editora McGraw-Hill Education ● Publicado 2005 ● Carregável 6 vezes ● Moeda EUR ● ID 2253383 ● Proteção contra cópia Adobe DRM
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