Photomasks, the printing masters for the fabrication of integrated circuits, have become a necessity of modern semiconductor manufacturing. This book details the science and technology of industrial photo mask production, including fundamental principles, industrial production flows, and technological evolution.
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Lingua Inglese ● Formato PDF ● Pagine 500 ● ISBN 9780071588911 ● Casa editrice McGraw-Hill Education ● Pubblicato 2005 ● Scaricabile 6 volte ● Moneta EUR ● ID 2253383 ● Protezione dalla copia Adobe DRM
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