Photomasks, the printing masters for the fabrication of integrated circuits, have become a necessity of modern semiconductor manufacturing. This book details the science and technology of industrial photo mask production, including fundamental principles, industrial production flows, and technological evolution.
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Bahasa Inggeris ● Format PDF ● Halaman-halaman 500 ● ISBN 9780071588911 ● Penerbit McGraw-Hill Education ● Diterbitkan 2005 ● Muat turun 6 kali ● Mata wang EUR ● ID 2253383 ● Salin perlindungan Adobe DRM
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